GB/T 11446.9-1997 Instrumental test method for particles in electronic grade water

This standard specifies the instrumental determination method for particles in electronic grade water. This standard is applicable to the continuous or single detection and counting of particles in electronic grade water, the particle size to be measured is greater than or equal to 0.5 μm, and the particle concentration is (0 to 10,000) particles/mL. GB/T 11446.9-1997 Instrumental test method for particles in electronic grade water GB/T11446.9-1997 Standard download decompression password: www.bzxz.net

GB/T 11446.3-11446.10-1997 GB/T11446.3~11446.10-1997 are respectively GB11446.3-89 "General Rules for Testing Methods of Electronic Grade Water", GB11446.4-89 "Test Methods for Resistivity of Electronic Grade Water", GB11446.5-89 "Atomic Absorption Spectrophotometric Test Methods for Trace Metals in Electronic Grade Water", GB11446.6-89 "Spectrophotometric Test Methods for Trace Silica in Electronic Grade Water", GB11446.7-89 "Ion Chromatographic Test Methods for Trace Ions in Electronic Grade Water", GB11446.8-89 "Test Methods for Total Organic Carbon in Electronic Grade Water", GB11446.9: 89 Instrumental Test Method for Particles in Electronic Grade Water". GB11446.10-89 "Filter Culture Test Method for Total Bacteria in Electronic Grade Water" has been revised.
Since GB/T11446.1 has added technical indicators for the leaving factory of metal nickel, nitrate ions, phosphate ions, and sulfur rubber ions, this standard has added the test methods for the determination of metal nickel by atomic absorption spectrophotometry and the determination of nitrate, phosphate, and sulfate by ion chromatography. The test method for bacteria only uses the filter culture method, and the method for measuring total organic carbon has also been completely rewritten. The general principles of test methods, the method for measuring resistivity, and the method for determining total silicon have all been revised and rewritten. This standard is implemented from the date of implementation, and G13 11446.3~11446.1089.
This standard is proposed by the Ministry of Electronics Industry of the People's Republic of China. This standard is submitted by the Standardization Institute of the Ministry of Electronics Industry of the People's Republic of China. The drafting units of this standard are: Institute of Semiconductors, Chinese Academy of Sciences, and Standardization Institute of the Ministry of Electronics Industry. The main drafters of this standard are: Wen Ruimei, Li Xiaoying, Wang Zaizhong, Xu Xuemin, You Pan, Liu Renzhong, and Xu Xiuxin. ..com1 Scope
National Standard of the People's Republic of China
Test method for particles in electronic grade water hy instrument
This standard specifies the instrumental determination method for particles in electronic grade water. GB/T 11446.9—1997
Replaces GB 11446. 9—89
This standard is applicable to the continuous or single detection and counting of particles in electronic grade water, the measured particle size is greater than or equal to 0.5μm, and the concentration of particles is (0~10 000) pieces/mL.
2 Referenced standards
The provisions contained in the following standards constitute the provisions of this standard by being cited in this standard. When this standard is published, the versions shown are valid. All standards will be revised, and the parties using this standard should discuss the possibility of using the latest versions of the following standards. GB/T11446-1—1997 Electronic grade water
GB/T11446.3—1997 General rules for test methods of electronic grade water 3 Definitions
3.1 Particle
Substances other than gases that are dispersed in water and form a homogeneous liquid phase with water. The particles mentioned in high-purity water refer to colloidal particles smaller than 1m, including microorganisms and their bodies, fragments, etc. 4 Principle
A beam of focused laser is incident perpendicular to the flow direction of the water sample, and the particles in the water will produce a light scattering effect. The intensity of the scattered light has a certain relationship with the size of the particles. The scattered light will be photomultiplied by the photodetector, and the light signal will be converted into electric pulses. The number and amplitude of the electric pulses are proportional to the number and diameter of the particles in the water respectively; after the electric pulse signal is amplified, it is input into the microcomputer, and then processed by the microcomputer to display or print out the test results.
The principle block diagram of this method is as follows;
He-Ne light source
Concentrating system
Microcomputer output
Approved by the State Technical Supervision Bureau on September 1, 1997 Scattering gland
Light system
Electrical conversion system
Amplification system
Signal processing system
Implemented on September 1, 1998
5 Reagents
GB/T 11446.9---1997
Blank water should comply with the electronic grade water of GB/T11446.1. 6 Instrument
Laser scattering submicron liquid particle counting and detection instrument with microcomputer. 7 Test steps
7.1 Preparation before testing the instrument
Turn on the power supply according to the instrument manual to prepare the instrument for working. 7.2 Test method selection
7.2.1 Continuous ladder: First clean the pipeline with degreasing detergent, then rinse it with EW-I grade electronic water 30111, and test it according to the instrument continuous test operating procedures.
7.2.2 Single sampling: First clean the sampling bottle with degreasing detergent, then with EW. grade electronic water, then take 4/5 volume of water sample from the sampling bottle and cover it and place it in the clean room for use. Before sampling, rinse the sampling bottle several times with water filtered by a microporous filter membrane with a pore size of 0.2 um. When sampling, external contamination should be eliminated. Then measure according to the instrument single drink test operating procedures. 8 Calculation of test results
The number of particles in each milliliter of water is calculated as follows: F
Wherein, P——Number of particles in each milliliter of water sample. Particles/mL,>./wwW.bzxz.Net
P,—→Number of particles in the water sample measured for the ith time - Particles/m1.tn——Number of measurements (n25 is specified in this standard). 9 Analysis error
The relative deviation of this method is less than 20%.
10 Test report
The format of the test report shall comply with the requirements of Chapter 6 of GB/T 11446.3-1997. 11 Precautions
11.1 Prevent external contamination during sampling and testing The sampling process, the pollution of the container, the environment and the detection chamber, the bubbles in the water and the vibration of the measurement process, and the change of the water flow rate will also affect the measurement. Therefore, the measurement should be carried out in a clean room of Class 100. The water flow rate must be stable. 11.2 The temperature of the laboratory and the environment must be stable, preferably between 10℃ and 30℃. 11.3 The water sample cannot be stirred. It should be left to stand for 30 minutes before measurement. 11.4 The instruments used in this method should be calibrated regularly. ..com
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