GB/T 4061-1983 Chemical corrosion test method for interlayer of silicon polycrystalline cross section

This standard applies to silicon polycrystalline rods grown by depositing silicon polycrystalline on thin silicon cores by hydrogen reduction of trichlorosilane and silicon tetrachloride. GB/T 4061-1983 Chemical corrosion test method for interlayer of silicon polycrystalline cross section GB/T4061-1983 standard download decompression password: www.bzxz.net

National Standard of the People's Republic of China
Test Method for Chemical Corrosion of Silicon Polymer Section Polyaystalline sllcon-Exn miadtiahmethad assesement nf aridwirhex antrst-section by cheinical tomusiueDE
669.7821548bZxz.net
.2:620.193.4
CR 4061--23
Product::Quality original code name
"Square flow principle
1.1Principle
Use the car to move the line product source product can be A chemical protection construction Da Ruida's beauty 1.2 million method
2This sample system service
2.1Take the itch
Original product can not be stationed outside the year, P
Home 4 to 1981220 years old
1054-1201 store
2.2Sample size number||tt| |2.3 Sample treatment
CB4O1-BS
2.8.1 Select pure F-1,-1:4 mud after the best training! Rinse thoroughly to observe the inspection method
You can drink coffee!
4 Light layer assessment
1 But the fire layer under the core is generally certified
Additional instructions:
The name of the Republic of China and the emperor's career
Eight standards leaked in the reading of the semi-conductor add materials: the drafting of the major standards ten must start the plan to remember the environment.
Tip: This standard content only shows part of the intercepted content of the complete standard. If you need the complete standard, please go to the top to download the complete standard document for free.