GB/T 4061-1983 Chemical corrosion test method for interlayer of silicon polycrystalline cross section

This standard applies to silicon polycrystalline rods grown by depositing silicon polycrystalline on thin silicon cores by hydrogen reduction of trichlorosilane and silicon tetrachloride. GB/T 4061-1983 Chemical corrosion test method for interlayer of silicon polycrystalline cross section GB/T4061-1983 standard download decompression password: www.bzxz.net

National Standard of the People's Republic of China
Test Method for Chemical Corrosion of Silicon Polymer Section Polyaystalline sllcon-Exn miadtiahmethad assesement nf aridwirhex antrst-section by cheinical tomusiueDE
669.7821548
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CR 4061--23
Product::Quality original code name
"Square flow principle
1.1Principle
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2.1Take the itch
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2.2Sample size number||tt| |2.3 Sample treatment
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2.8.1 Select pure F-1,-1:4 mud after the best training! Rinse thoroughly to observe the inspection method
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4 Light layer assessment
1 But the fire layer under the core is generally certified
Additional instructions:
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Eight standards leaked in the reading of the semi-conductor add materials: the drafting of the major standards ten must start the plan to remember the environment.
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