GB/T 14601-1993 High-purity ammonia for use in the electronics industry
time:
2024-08-08 09:31:13
- GB/T 14601-1993
- in force
Standard ID:
GB/T 14601-1993
Standard Name:
High-purity ammonia for use in the electronics industry
Chinese Name:
电子工业用气体 高纯氨
Standard category:
National Standard (GB)
-
Date of Release:
1993-08-26 -
Date of Implementation:
1994-07-01
Standard ICS number:
Chemical Technology>>Chemical Products>>71.100.20 Industrial GasesChina Standard Classification Number:
Chemicals>>Other Chemical Products>>G86 Industrial Gases and Chemical Gases
Release date:
1993-08-26Review date:
2004-10-14Drafting Organization:
Southwest Research Institute of Chemical Industry, Ministry of Chemical IndustryFocal point Organization:
National Technical Committee for Standardization of Semiconductor Materials and EquipmentPublishing Department:
State Bureau of Technical SupervisionCompetent Authority:
National Standardization Administration
Description (Translated English) / downloadSkip to download
Summary:
This standard specifies the technical requirements, test methods, inspection rules and product packaging, marking, transportation, storage and safety requirements of high-purity ammonia for electronic industry. This standard applies to bottled high-purity ammonia. This product is mainly used in the semiconductor industry, chemical vapor deposition of silicon nitride, and can also be used for nitridation of silicon or silicon oxide. GB/T 14601-1993 High-purity ammonia for electronic industry GB/T14601-1993 Standard download decompression password: www.bzxz.net
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