GB/T 14601-1993 High-purity ammonia for use in the electronics industry
time:
2024-08-08 09:31:13
- GB/T 14601-1993
- in force
Standard ID:
GB/T 14601-1993
Standard Name:
High-purity ammonia for use in the electronics industry
Chinese Name:
电子工业用气体 高纯氨
Standard category:
National Standard (GB)
-
Date of Release:
1993-08-26 -
Date of Implementation:
1994-07-01
Standard ICS number:
Chemical Technology>>Chemical Products>>71.100.20 Industrial GasesChina Standard Classification Number:
Chemicals>>Other Chemical Products>>G86 Industrial Gases and Chemical Gases
Release date:
1993-08-26Review date:
2004-10-14Drafting Organization:
Southwest Research Institute of Chemical Industry, Ministry of Chemical IndustryFocal point Organization:
National Technical Committee for Standardization of Semiconductor Materials and EquipmentPublishing Department:
State Bureau of Technical SupervisionCompetent Authority:
National Standardization Administration
Description (Translated English) / downloadSkip to download
Summary:
This standard specifies the technical requirements, test methods, inspection rules and product packaging, marking, transportation, storage and safety requirements of high-purity ammonia for electronic industry. This standard applies to bottled high-purity ammonia. This product is mainly used in the semiconductor industry, chemical vapor deposition of silicon nitride, and can also be used for nitridation of silicon or silicon oxide. GB/T 14601-1993 High-purity ammonia for electronic industry GB/T14601-1993 Standard download decompression password: www.bzxz.net
- Recommended standards
- GB/T 11320-1989 Test methods for piezoelectric ceramic materials - Test methods for piezoelectric ceramic materials with low mechanical quality factor
- NY/T 421-2000 Green food wheat flour
- MT/T 516.2-1995 Drill bits for hydraulic rock drills in coal mines
- JB/T 8486.2-1996 Technical requirements for CNC universal tool milling machines
- JJG 229-1998 Verification Regulation of Industry Platinum Copper Resistance Thermometers
- GB/T 14613-1993 Whole wheat flour fermentation time test
- JB/T 6682-1993 Grain combine harvester rubber track series parameters
- GB 20595-2006 Safety rules for classification、precautionary labelling and precautionary statements of chemicals - Respiratory or skin sensitization
- QB/T 2707-2005 Preparation and conditioning of leather physical and mechanical test specimens
- NY/T 944-2006 Grades and specifications of chillies
- GB/T 2951.9-1997 General test methods for cable insulation and sheathing materials Part 4: Specific test methods for polyethylene and polypropylene mixtures Section 2: Elongation at break test after pretreatment - Winding test after pretreatment - Winding test after air heat aging - Determination of quality
- GB 16191-1996 Hygienic standard for trifluoromethyl hypofluorite in workplace air
- QB/T 2734-2005 Polyester (PET) bottled beverage production line
- MT/T 154.6-1995 Method for compiling models of safety helmet lamps for mining
- MT/T 416-1995 General technical requirements for coal loaders
Please remember: "bzxz.net" is the combination of the first letters of the Chinese pinyin of the four Chinese characters "standard download" and the international top-level domain name ".net". ©2024 Standard download websitewww.bzxz.net Mail：bzxznet@163.com