GB/T 15909-1995 Silane (SiH4) gas for use in the electronics industry
time:
2024-08-08 13:12:36
- GB/T 15909-1995
- in force
Standard ID:
GB/T 15909-1995
Standard Name:
Silane (SiH4) gas for use in the electronics industry
Chinese Name:
电子工业用气体 硅烷(SiH4)
Standard category:
National Standard (GB)
-
Date of Release:
1995-01-02 -
Date of Implementation:
1996-08-01
Standard ICS number:
Chemical Technology>>Chemical Products>>71.100.20 Industrial GasesChina Standard Classification Number:
Chemicals>>Other Chemical Products>>G86 Industrial Gases and Chemical Gases
Release date:
1995-12-20Review date:
2004-10-14Drafting Organization:
Southwest Research Institute of Chemical Industry, Ministry of Chemical IndustryFocal point Organization:
National Technical Committee for Standardization of Semiconductor Materials and EquipmentPublishing Department:
State Bureau of Technical SupervisionCompetent Authority:
National Standardization Administration
Description (Translated English) / downloadSkip to download
Summary:
This standard specifies the technical requirements, inspection methods, inspection rules, packaging, marking, transportation, storage and safety requirements of silane gas for the electronics industry. This standard is mainly used for epitaxial deposition of polysilicon and single crystal silicon, low-temperature chemical vapor deposition of silicon dioxide, and amorphous silicon thin film deposition in the electronics industry. GB/T 15909-1995 Silane gas (SiH4) for the electronics industry GB/T15909-1995 Standard download decompression password: www.bzxz.net
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