Methods of measurement for EL2 concentration in semi-insulation Gallium arsenide by infra-red absorption

SJ 3249.4-1989 Infrared absorption test method for EL2 concentration in semi-insulating gallium arsenide SJ3249.4-1989 standard download decompression password: www.bzxz.net

Standard of the Ministry of Machinery and Electronics Industry of the People's Republic of China Infrared absorption test method for EL2 concentration in semi-insulating gallium arsenide Subject content and scope of application
SJ3249.4-89
This standard specifies the infrared absorption measurement principle, instrumentation, measurement steps, result calculation and accuracy of deep donor concentration E12 in semi-insulating gallium arsenide.
This standard is applicable to the determination of E12 concentration in undoped semi-insulating gallium arsenide, and is applicable to sample thickness of 2 to 4 mm. It is not suitable for measuring EL2 concentration in chromium-doped semi-insulating samples. 2 Principle
The EI2 deep electron trap light absorption coefficient in semi-insulating GaAs has a corresponding relationship with its concentration. The absorption coefficient at 1.0972μm is measured and the EL2 concentration is calculated by the empirical calibration formula. 3 Instruments and equipment
Spectrophotometer with a range of 0.8~2.5m or wider. 4 Test steps
4.1 Scan with absorption method for zero line calibration. The instrument should be carefully adjusted so that the fluctuation of zero line absorbance in the range of 0.8~2.5μm is no more than ±0.002.
4.2 Place the double-sided polished sample in the light path and align the light beam to the required measurement position. 4.3 Measure the absorption spectrum of the sample in the range of 0.8~2.5μm to obtain the absorbance A-wavelength curve, as shown in the figure: 5.59
Sample original wavelength 3.86cm
lhaioo
Wavelength (×10)μm
Figure Absorption spectrum of typical semi-insulating gallium arsenide sample Approved by the Ministry of Machinery and Electronics Industry of the People's Republic of China on 1989-03-20 and implemented on 1989-03-25
5 Calculation of results
SJ32484-89
5.1 Based on the sample absorption spectrum recorded by the spectrophotometer. Calculate the EL2 concentration by the following formula: Ngl:=1.25×1016α
Where: N—-EL2 concentration (cm)bzxZ.net
EL2 absorption coefficient (cm-1)
αCalculate by the formula below
Where: d sample thickness, cm
-The absorbance values ​​corresponding to 1.0972μm and 2.0μm in the spectrum, 5.2 Calculation of EL2 concentration of typical semi-insulating sample; 5.2.1 The sample thickness is known to be 0.386cm; (1)
5.2.2 The A-input curve obtained by the experiment is shown in the figure, and A is found. and A are 0.487 and 0.293 respectively, 5.2.3α is calculated by the following formula:
The concentration of sample EL2 is
6Report
The report content is as follows
a. Sample source and number
b. Diagram of measurement location,
ca and EL2 data,
α=0.487-0.293×2.30
=1.16(cm-1)
NL21.25×1016×1.16
=1.45×1016（cm-3）
d. Test date and name of tester.
7Accuracy
The measurement accuracy of this method is 10%.
Additional Notes:
This standard was drafted by the 46th Research Institute of the Ministry of Machinery and Electronics Industry. The main drafters of this standard are: Li Guangping, Xun Xiukun, Wang Qin, Zheng Ju, Ge Ping2
Tip: This standard content only shows part of the intercepted content of the complete standard. If you need the complete standard, please go to the top to download the complete standard document for free.