GB/T 15862-1995 General technical requirements for ion implanters
time:
2024-08-08 13:51:33
- GB/T 15862-1995
- in force
Standard ID:
GB/T 15862-1995
Standard Name:
General technical requirements for ion implanters
Chinese Name:
离子注入机通用技术条件
Standard category:
National Standard (GB)
-
Date of Release:
1995-01-02 -
Date of Implementation:
1996-08-01
Standard ICS number:
Electronics>>31.200 Integrated Circuits, MicroelectronicsChina Standard Classification Number:
Electronic Components and Information Technology>>Electronic Industry Production Equipment>>L97 Processing Equipment
Release date:
1995-12-22Review date:
2004-10-14Drafting Organization:
The 48th Research Institute of the Ministry of Electronics IndustryFocal point Organization:
Ministry of Information Industry (Electronics)Publishing Department:
State Bureau of Technical SupervisionCompetent Authority:
Ministry of Information Industry (Electronics)
Description (Translated English) / downloadSkip to download
Summary:
This standard specifies the terminology, product classification, technical requirements, testing, inspection rules and marking, packaging, transportation and storage of ion implanters. This standard applies to electric energy ion implanters for semiconductor processes. GB/T 15862-1995 General Technical Requirements for Ion Implanters GB/T15862-1995 Standard download decompression password: www.bzxz.net
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