GB/T 15870-1995 Chromium films for hard surface photomasks
time:
2024-08-08 13:44:37
- GB/T 15870-1995
- in force
Standard ID:
GB/T 15870-1995
Standard Name:
Chromium films for hard surface photomasks
Chinese Name:
硬面光掩模用铬薄膜
Standard category:
National Standard (GB)
-
Date of Release:
1995-01-02 -
Date of Implementation:
1996-08-01
Standard ICS number:
31.030China Standard Classification Number:
Electronic Components and Information Technology>>Electronic Industry Production Equipment>>L97 Processing Equipment
Release date:
1995-12-22Review date:
2004-10-14Drafting Organization:
Changsha Shaoguang Microelectronics CorporationFocal point Organization:
National Technical Committee for Standardization of Semiconductor Materials and EquipmentPublishing Department:
State Bureau of Technical SupervisionCompetent Authority:
National Standardization Administration
Description (Translated English) / downloadSkip to download
Summary:
This standard specifies the requirements, test methods, inspection rules, etc. for chromium thin films used in hard surface photomasks. This standard applies to chromium thin films used in hard surface photomasks. GB/T 15870-1995 Chromium thin films used in hard surface photomasks GB/T15870-1995 Standard download decompression password: www.bzxz.net
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