GB/T 14600-1993 Nitrous oxide gas for use in the electronics industry
time:
2024-08-08 09:32:03
- GB/T 14600-1993
- in force
Standard ID:
GB/T 14600-1993
Standard Name:
Nitrous oxide gas for use in the electronics industry
Chinese Name:
电子工业用气体 氧化亚氮
Standard category:
National Standard (GB)
-
Date of Release:
1993-08-26 -
Date of Implementation:
1994-07-01
Standard ICS number:
Chemical Technology>>Chemical Products>>71.100.20 Industrial GasesChina Standard Classification Number:
Chemicals>>Other Chemical Products>>G86 Industrial Gases and Chemical Gases
Release date:
1993-08-26Review date:
2004-10-14Drafter:
Duan ShufangDrafting Organization:
Southwest Research Institute of Chemical Industry, Ministry of Chemical IndustryFocal point Organization:
National Technical Committee for Standardization of Semiconductor Materials and EquipmentProposing Organization:
Ministry of Chemical Industry of the People's Republic of ChinaPublishing Department:
State Bureau of Technical SupervisionCompetent Authority:
National Standardization Administration
Description (Translated English) / downloadSkip to download
Summary:
This standard specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation and storage requirements for bottled nitrous oxide, a gas used in the electronics industry. This standard applies to nitrous oxide produced by the thermal decomposition of ammonium nitrate. This product is mainly used in chemical vapor deposition and plasma processes of silicon dioxide in the electronics industry. GB/T 14600-1993 Nitrous oxide, a gas used in the electronics industry GB/T14600-1993 Standard download decompression password: www.bzxz.net
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