GB/T 15871-1995 Hard surface photomask substrate

time: 2024-08-08 13:43:46
  • GB/T 15871-1995
  • in force

Basic Information

  • Standard ID:

    GB/T 15871-1995

  • Standard Name:

    Hard surface photomask substrate

  • Chinese Name:

    硬面光掩模基板

  • Standard category:

    National Standard (GB)

  • Date of Release:

    1995-01-02
  • Date of Implementation:

    1996-08-01

standard classification number

  • Standard ICS number:

    31.030
  • China Standard Classification Number:

    Electronic Components and Information Technology>>Electronic Industry Production Equipment>>L97 Processing Equipment

associated standards

  • Procurement status:

    SEMI P1-1992, NEQ

Publication information

  • publishing house:

    China Standards Press
  • Publication date:

    1996-08-01

Other Information

  • Release date:

    1995-12-22
  • Review date:

    2004-10-14
  • Drafting Organization:

    Changsha Shaoguang Microelectronics Corporation
  • Focal point Organization:

    National Technical Committee for Standardization of Semiconductor Materials and Equipment
  • Publishing Department:

    State Bureau of Technical Supervision
  • Competent Authority:

    National Standardization Administration
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Summary:

This standard specifies the requirements, test methods, inspection rules, etc. for glass substrates used in hard-surface photomasks. This standard applies to glass substrates used in hard-surface photomasks. GB/T 15871-1995 Hard-surface photomask substrates GB/T15871-1995 Standard download decompression password: www.bzxz.net
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