
GB/T 15871-1995 Hard surface photomask substrate
time:
2024-08-08 13:43:46
- GB/T 15871-1995
- in force
Standard ID:
GB/T 15871-1995
Standard Name:
Hard surface photomask substrate
Chinese Name:
硬面光掩模基板
Standard category:
National Standard (GB)
-
Date of Release:
1995-01-02 -
Date of Implementation:
1996-08-01
Standard ICS number:
31.030China Standard Classification Number:
Electronic Components and Information Technology>>Electronic Industry Production Equipment>>L97 Processing Equipment
Release date:
1995-12-22Review date:
2004-10-14Drafting Organization:
Changsha Shaoguang Microelectronics CorporationFocal point Organization:
National Technical Committee for Standardization of Semiconductor Materials and EquipmentPublishing Department:
State Bureau of Technical SupervisionCompetent Authority:
National Standardization Administration

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Summary:
This standard specifies the requirements, test methods, inspection rules, etc. for glass substrates used in hard-surface photomasks. This standard applies to glass substrates used in hard-surface photomasks. GB/T 15871-1995 Hard-surface photomask substrates GB/T15871-1995 Standard download decompression password: www.bzxz.net
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