GB/T 15861-1995 General technical requirements for ion beam etching machines
time:
2024-08-08 13:52:25
- GB/T 15861-1995
- in force
Standard ID:
GB/T 15861-1995
Standard Name:
General technical requirements for ion beam etching machines
Chinese Name:
离子束蚀刻机通用技术条件
Standard category:
National Standard (GB)
-
Date of Release:
1995-01-02 -
Date of Implementation:
1996-08-01
Standard ICS number:
Electronics>>31.200 Integrated Circuits, MicroelectronicsChina Standard Classification Number:
Electronic Components and Information Technology>>Electronic Industry Production Equipment>>L97 Processing Equipment
Release date:
1995-12-22Review date:
2004-10-14Drafting Organization:
Changsha Semiconductor Process Equipment Institute of ElectronicsFocal point Organization:
Ministry of Information Industry (Electronics)Publishing Department:
State Bureau of Technical SupervisionCompetent Authority:
Ministry of Information Industry (Electronics)
Description (Translated English) / downloadSkip to download
Summary:
This standard specifies the terminology, product classification, technical requirements, test methods, inspection rules, packaging, transportation, storage, etc. of ion beam etcher. This standard is applicable to general ion beam etcher with physical sputtering corrosion. GB/T 15861-1995 General Technical Requirements for Ion Beam Etchers GB/T15861-1995 Standard download decompression password: www.bzxz.net
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