GB/T 15861-1995 General technical requirements for ion beam etching machines
time:
2024-08-08 13:52:25
- GB/T 15861-1995
- in force
Standard ID:
GB/T 15861-1995
Standard Name:
General technical requirements for ion beam etching machines
Chinese Name:
离子束蚀刻机通用技术条件
Standard category:
National Standard (GB)
-
Date of Release:
1995-01-02 -
Date of Implementation:
1996-08-01
Standard ICS number:
Electronics>>31.200 Integrated Circuits, MicroelectronicsChina Standard Classification Number:
Electronic Components and Information Technology>>Electronic Industry Production Equipment>>L97 Processing Equipment
Release date:
1995-12-22Review date:
2004-10-14Drafting Organization:
Changsha Semiconductor Process Equipment Institute of ElectronicsFocal point Organization:
Ministry of Information Industry (Electronics)Publishing Department:
State Bureau of Technical SupervisionCompetent Authority:
Ministry of Information Industry (Electronics)
Description (Translated English) / downloadSkip to download
Summary:
This standard specifies the terminology, product classification, technical requirements, test methods, inspection rules, packaging, transportation, storage, etc. of ion beam etcher. This standard is applicable to general ion beam etcher with physical sputtering corrosion. GB/T 15861-1995 General Technical Requirements for Ion Beam Etchers GB/T15861-1995 Standard download decompression password: www.bzxz.net
- Recommended standards
- GB 18164-2000 General technical requirements for Ferris wheel type amusement rides
- JB/T 8833-2001 Welding positioner
- SJ 20024-1992 Measuring methods of traveling wave tube
- GB 18614-2002 Heptafluoropropane (HFC227ea) fire extinguishing agent
- GB/T 4260-2004 Straight shank flat bottom countersinks with integral guide pin
- GB/T 4958.11-1988 Measurement methods for equipment used in terrestrial radio-relay systems Part 3: Measurements on emulation systems Section 3: Measurements on black-and-white and color television transmissions
- JB/T 7939-1999 Ratio of the two chamber areas of single piston rod hydraulic cylinder
- HG/T 21576-1994 Double switch plug valve
- HG 3055-1988 Determination of apparent density of latex sponge
- QB/T 2257-1996 Household sewing machine motors and speed regulators
- SJ/T 10035-1991 Detail specification for electronic components Electronic tube of type FC-620F (Applicable for certification)
- GB/T 191-2008 Packaging - Pictorial marking for handling of goods
- GB/T 14896.1-1994 Basic terminology for special processing machine tools
- GB/T 4215-1984 Determination of sound power level of noise from metal cutting machine tools
- GB/T 11442-1995 General technical requirements for satellite television earth receiving stations
Please remember: "bzxz.net" is the combination of the first letters of the Chinese pinyin of the four Chinese characters "standard download" and the international top-level domain name ".net". ©2024 Standard download websitewww.bzxz.net Mail：bzxznet@163.com