JB/T 2965-1992 Sputtering ion pump performance test method
time:
2024-08-04 05:41:59
- JB/T 2965-1992
- in force
Standard ID:
JB/T 2965-1992
Standard Name:
Sputtering ion pump performance test method
Chinese Name:
溅射离子泵 性能测试方法
Standard category:
Machinery Industry Standard (JB)
-
Date of Release:
1992-01-01 -
Date of Implementation:
1992-01-01
China Standard Classification Number:
Machinery>>General Machinery and Equipment>>J78 Vacuum Technology and Equipment
alternative situation:
JB 2965-81
Focal point Organization:
Shenyang Vacuum Technology Research InstitutePublishing Department:
Shenyang Vacuum Technology Research Institute
Description (Translated English) / downloadSkip to download
Summary:
This standard specifies the performance test method for sputtering ion pumps. This standard applies to ion pumps with a pumping speed greater than 10Ls(-1). JB/T 2965-1992 Performance test method for sputtering ion pumps JB/T2965-1992 Standard download decompression password: www.bzxz.net
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