Determination method for interstital atomic oxygen content of germanium by infrared abaorption

This standard specifies the method for determining the interstitial oxygen content in germanium single crystals by infrared absorption. This standard is applicable to the determination of interstitial oxygen content in germanium single crystals, and the measurement range is from 10 ppba to the maximum solid solubility of interstitial oxygen in germanium single crystals. SJ/T 10625-1995 Infrared absorption determination method for interstitial oxygen content in germanium single crystals SJ/T10625-1995 Standard download decompression password: www.bzxz.net
This standard specifies the method for determining the interstitial oxygen content in germanium single crystals by infrared absorption. This standard is applicable to the determination of interstitial oxygen content in germanium single crystals, and the measurement range is from 10 ppba to the maximum solid solubility of interstitial oxygen in germanium single crystals.

Electronic Industry Standard of the People's Republic of China
SI/T 10625-1995
Determination method for interstitial atomic oxygen content of germanium by infrared absorption
Issued on April 22, 1995
Implementation on October 1, 1995
Issued by the Ministry of Electronics Industry of the People's Republic of China Electronic Industry Standard of the People's Republic of China
Determination method for interstitial atomic oxygen content of germanium by infrared absorption1 Subject content and scope of application1.1 Subject contentThis standard specifies the method for determining the interstitial oxygen content of germanium by infrared absorption. 1.2 Standards
SI/T 10625-1995
This standard is applicable to the determination of interstitial oxygen content in single crystals. The range of measurement is 10ppba, which is the maximum solubility of hydrogen in single crystals.
2 Principle of the method
This method uses an infrared spectrometer to measure the infrared absorption coefficient of the zirconium-oxygen bond at 11.71 to determine the interstitial oxygen content. The oxygen content in the single crystal has a corresponding relationship with the red absorption coefficient of 11.71. 3 Test instruments
Double beam infrared spectrophotometer or single leaf transform infrared spectrometer. The resolution of the instrument at a wave number of 1000cm-1 should be better than 4cm-1,
b. It has suitable channels:
c, micrometer, accuracy 0.01mm;
d. Standard flat germanium single crystal.
4 Preparation of samples
4.1 Preparation of test samples
4.1.1 The sample after grinding needs to be double-glazed to make both surfaces optical mirror. 4.1.2 The thickness difference of the sample at the measuring part should be less than 10μm. 4.1.3 When the oxygen content is equal to or less than 1psma, the sample thickness is 2-5mm; when the content is less than 1ppm, the sample thickness is 10-25mm
4.2 Preparation of reference products
4.2.1 Select a single germanium product with an indirect gas content of less than 1ppba as the reference sample. 4.2.2 The preparation of the reference sample is the same as 4.1.1 to 4.1.2. Approved by the Ministry of Electronics Industry of the People's Republic of China on April 22, 1995, and implemented on October 1, 1995
SJ/T10625-1995
4.2.3 The thickness difference between the reference sample and the sample to be tested should be less than 0.5%. 5 Test procedure
5.1 Selection of sample thickness
Determine the thickness of the sample to be tested according to the requirements of 4.1.3. 5.2 Selection of measurement method
5.2.) Difference method (cutting method)
5.2.1.t Place the sample holder under the sample beam and reference beam respectively, with the light aperture of 10mmg5.2.1.2 Adjust the transmittance to 0% (for dual-width infrared spectrophotometer) and 100%5.2.1.3 Place the sample to be tested and the reference sample with matching thickness under the test beam and reference beam respectively. 5.2.1.4 For the double beam spectrophotometer, adjust the scanning speed, time constant, slit width, gain and other instrument parameters; for the multi-spectrometer, scan at least 128 times, and the half width of the absorption band of the oxygen-oxygen bond at 1.7 μm is 8 cn-1,
, and the method of determination is as follows to determine the baseline transmittance. And adjust the transmittance T, let T be, draw a vertical line through point T, and intersect the two sides of the absorption group at MN, and draw a vertical line from M and N, and intersect the horizontal mark D, U2, A-2 (em 5.2.1.5 Scan the range of 1050~650cm1 and get the absorption band at 854cm: 5.2.1.6 Measure multiple times and average the results. 5.2.2 Air reference method 5.5.2.1 During measurement, except that no reference sample is placed in the reference light source, the rest of the procedures are as follows 5.2.1.1~5.2.1.6 Calculation of test results 6.1 Calculation of absorption coefficient α format (1): 5.2.1.6 Calculation of absorption coefficient α format (1): The transmittance corresponding to the baseline and peak, device: 2
D-sample thickness, cmbzxZ.net
SJ/T10625-1995
When considering multiple reflections inside the sample, the absorption coefficient. Calculation is Appendix A Supplement). 6.2 Calculation of oxygen content N[]
6.2.1 Difference method
Calculate according to (2) or formula (3):
At 300K:
N[0]=2.81α(ppme)
N[0: = 1.25 × 10(atams.cm 3].6.2.2 Air reference method
When using the air reference method to measure the base, the baseline is made close to both sides of the absorption band to eliminate the influence of lattice absorption. The calculation method is 6.2.1c
7 Precision
The relative standard deviation of the measurement in a single laboratory is ±10% (R1S%). 8 Report
The test report should include the following:
Measurement method;
Base measurement instrument:
: Product thickness number ：
Calculated absorption coefficient:
Except nitrogen content;
Operator and measurement date.
SJ/T10625-1995
Appendix A
Calculation of absorption coefficient α
(Supplement)
Due to the multiple reflections of infrared radiation inside the sample, the formula (1) in this standard is only approximate. Under the assumption that there are multiple reflections inside, the transmittance at direct incidence is: (! - R)ea)
- R,-2en
Wherein: R-reflection coefficient;
a-absorption coefficient, cm-;
D-sample density, cm.
The relative error between the absorption coefficient obtained by formula (1) of this standard and the absorption coefficient obtained by formula (4) is less than 10%. Additional remarks:
This standard is under the jurisdiction of the Standardization Research Institute of the Ministry of Electronics Industry. This standard was drafted by the 46th Research Institute of the Ministry of Electronics Industry. The main drafters of this standard are: Xun Xiukun, Li Guangping, Ru Qiongna, Duan Shuguang. 4
Tip: This standard content only shows part of the intercepted content of the complete standard. If you need the complete standard, please go to the top to download the complete standard document for free.